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Impact of processing parameters on leakage current and defect behavior of n+p silicon junction diodes
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Authors
Gramenova, Emilia
;
Jansen, Philippe
;
Simoen, Eddy
;
Vanhellemont, Jan
;
Dupas, Luc
;
Deferm, Ludo
Issue
1
Journal
J. Electrochem. Soc.
Volume
146
Title
Impact of processing parameters on leakage current and defect behavior of n+p silicon junction diodes
Publication type
Journal article
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