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Integration of Ruthenium-based Wordline in a 3-D NAND Memory Devices

dc.contributor.authorBreuil, Laurent
dc.contributor.authorEl Hajjam, Gabriel
dc.contributor.authorRamesh, Siva
dc.contributor.authorAjaykumar, Arjun
dc.contributor.authorArreghini, Antonio
dc.contributor.authorZhang, Liping
dc.contributor.authorSebaai, Farid
dc.contributor.authorNyns, Laura
dc.contributor.authorRaymaekers, Tom
dc.contributor.authorRosmeulen, Maarten
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorFurnemont, Arnaud
dc.date.accessioned2021-10-28T20:29:21Z
dc.date.available2021-10-28T20:29:21Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34821
dc.sourceIIOimport
dc.titleIntegration of Ruthenium-based Wordline in a 3-D NAND Memory Devices
dc.typeProceedings paper
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorRamesh, Siva
dc.contributor.imecauthorAjaykumar, Arjun
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorRaymaekers, Tom
dc.contributor.imecauthorRosmeulen, Maarten
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecRamesh, Siva::0000-0002-8473-7258
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecRosmeulen, Maarten::0000-0002-3663-7439
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage4
dc.source.conference2020 IEEE International Memory Workshop (IMW)
dc.source.conferencedate17/05/2020
dc.source.conferencelocationDresden Germany
dc.identifier.urlhttps://ieeexplore.ieee.org/abstract/document/9108111
imec.availabilityPublished - imec


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