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ESD protection diodes in sub-5nm gate-all-around nanosheet technologies

dc.contributor.authorChen, Shih-Hung
dc.contributor.authorVeloso, Anabela
dc.contributor.authorMertens, Hans
dc.contributor.authorHellings, Geert
dc.contributor.authorSimicic, Marko
dc.contributor.authorChen, Wen Chieh
dc.contributor.authorWu, Wei-Min
dc.contributor.authorSerbulova, Kateryna
dc.contributor.authorLinten, Dimitri
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-28T20:40:31Z
dc.date.available2021-10-28T20:40:31Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34886
dc.sourceIIOimport
dc.titleESD protection diodes in sub-5nm gate-all-around nanosheet technologies
dc.typeMeeting abstract
dc.contributor.imecauthorChen, Shih-Hung
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorSimicic, Marko
dc.contributor.imecauthorChen, Wen Chieh
dc.contributor.imecauthorWu, Wei-Min
dc.contributor.imecauthorSerbulova, Kateryna
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecSimicic, Marko::0000-0002-3623-1842
dc.contributor.orcidimecSerbulova, Kateryna::0000-0001-7326-9949
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewyes
dc.source.conference2020 42nd EOS/ESD Symposium
dc.source.conferencedate13/09/2020
dc.source.conferencelocationReno, NV USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/9241334
imec.availabilityPublished - imec


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