ESD protection diodes in sub-5nm gate-all-around nanosheet technologies

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Authors
Chen, Shih-Hung; Veloso, Anabela; Mertens, Hans; Hellings, Geert; Simicic, Marko; Chen, Wen Chieh; Wu, Wei-Min; Serbulova, Kateryna; Linten, Dimitri; Horiguchi, Naoto
Conference
2020 42nd EOS/ESD Symposium
Title
ESD protection diodes in sub-5nm gate-all-around nanosheet technologies
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Meeting abstract
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