Publication:

ESD protection diodes in sub-5nm gate-all-around nanosheet technologies

Date

2020
Meeting abstract
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0001-5490-0416
cris.virtual.orcid0000-0002-3623-1842
cris.virtual.orcid0000-0002-8390-6785
cris.virtual.orcid0000-0001-8434-1838
cris.virtual.orcid0000-0002-1298-6693
cris.virtual.orcid0000-0002-3392-6892
cris.virtual.orcid0000-0001-7326-9949
cris.virtual.orcid0000-0002-6481-2951
cris.virtual.orcid0000-0002-5376-2119
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.department9f04b13f-f81c-4d48-a5bd-0b2cb5210392
cris.virtualsource.department894d712a-328b-43e9-8331-871ceac6a4e6
cris.virtualsource.departmenta9297c9a-1d0e-40a3-a8a8-5edf6176ec9a
cris.virtualsource.department63eea5a8-b81a-4bb2-aa67-715ba610971a
cris.virtualsource.department18558a60-c5ee-4b94-86e9-fbff30d5bb3a
cris.virtualsource.department49b2e4a0-e3c7-4524-b945-f94059646804
cris.virtualsource.departmentd2d98311-8bd8-47d8-a4b6-644575294049
cris.virtualsource.departmente0386a23-f2bf-4f53-a36f-c1380bca0db7
cris.virtualsource.departmentcd811942-aea0-4312-8eb5-d9cc179a6b3d
cris.virtualsource.departmentbd265d49-9bfb-424d-adea-35c86526f50d
cris.virtualsource.orcid9f04b13f-f81c-4d48-a5bd-0b2cb5210392
cris.virtualsource.orcid894d712a-328b-43e9-8331-871ceac6a4e6
cris.virtualsource.orcida9297c9a-1d0e-40a3-a8a8-5edf6176ec9a
cris.virtualsource.orcid63eea5a8-b81a-4bb2-aa67-715ba610971a
cris.virtualsource.orcid18558a60-c5ee-4b94-86e9-fbff30d5bb3a
cris.virtualsource.orcid49b2e4a0-e3c7-4524-b945-f94059646804
cris.virtualsource.orcidd2d98311-8bd8-47d8-a4b6-644575294049
cris.virtualsource.orcide0386a23-f2bf-4f53-a36f-c1380bca0db7
cris.virtualsource.orcidcd811942-aea0-4312-8eb5-d9cc179a6b3d
cris.virtualsource.orcidbd265d49-9bfb-424d-adea-35c86526f50d
dc.contributor.authorChen, Shih-Hung
dc.contributor.authorVeloso, Anabela
dc.contributor.authorMertens, Hans
dc.contributor.authorHellings, Geert
dc.contributor.authorSimicic, Marko
dc.contributor.authorChen, Wen-Chieh
dc.contributor.authorWu, Wei-Min
dc.contributor.authorSerbulova, Kateryna
dc.contributor.authorLinten, Dimitri
dc.contributor.authorHoriguchi, Naoto
dc.contributor.imecauthorChen, Shih-Hung
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorSimicic, Marko
dc.contributor.imecauthorChen, Wen Chieh
dc.contributor.imecauthorWu, Wei-Min
dc.contributor.imecauthorSerbulova, Kateryna
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecSimicic, Marko::0000-0002-3623-1842
dc.contributor.orcidimecSerbulova, Kateryna::0000-0001-7326-9949
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2021-10-28T20:40:31Z
dc.date.available2021-10-28T20:40:31Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34886
dc.identifier.urlhttps://ieeexplore.ieee.org/document/9241334
dc.source.conference2020 42nd EOS/ESD Symposium
dc.source.conferencedate13/09/2020
dc.source.conferencelocationReno, NV USA
dc.title

ESD protection diodes in sub-5nm gate-all-around nanosheet technologies

dc.typeMeeting abstract
dspace.entity.typePublication
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