Publication:

ESD protection diodes in sub-5nm gate-all-around nanosheet technologies

Date

2020
Meeting abstract
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Author(s)

Chen, Shih-Hung  
;
Veloso, Anabela  
;
Mertens, Hans  
;
Hellings, Geert  
;
Simicic, Marko  
;
Chen, Wen Chieh  
;
Wu, Wei-Min  
;
Serbulova, Kateryna  
;
Linten, Dimitri  
;
Horiguchi, Naoto  

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Abstract

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1963 since deposited on 2021-10-28
Acq. date: 2026-01-26

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1963 since deposited on 2021-10-28
Acq. date: 2026-01-26

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