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Positive bias temperature instability of HfO2-based gate stacks at reduced thermal budget for future CMOS technologies
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Positive bias temperature instability of HfO2-based gate stacks at reduced thermal budget for future CMOS technologies
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Date
2020
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claes, Dieter
;
Franco, Jacopo
;
Collaert, Nadine
;
Linten, Dimitri
;
Heyns, Marc
Journal
Journal of Applied Physics
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1911
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Acq. date: 2026-02-25
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Views
1911
since deposited on 2021-10-28
1
last month
Acq. date: 2026-02-25
Citations