Authors

Claes, Dieter; Franco, Jacopo; Collaert, Nadine; Linten, Dimitri; Heyns, Marc

ISSN

0021-8979

Issue

10

Journal

Journal of Applied Physics

Volume

128

Title

Positive bias temperature instability of HfO2-based gate stacks at reduced thermal budget for future CMOS technologies

Publication type

Journal article