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HREM characterization of oxygen ion beam sputtered epitaxial CoSi2

dc.contributor.authorBender, Hugo
dc.contributor.authorDe Coster, Walter
dc.contributor.authorBrijs, Bert
dc.contributor.authorAlay, Josep Lluis
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T12:39:46Z
dc.date.available2021-09-29T12:39:46Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34
dc.sourceIIOimport
dc.titleHREM characterization of oxygen ion beam sputtered epitaxial CoSi2
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage637
dc.source.endpage638
dc.source.conferenceProceedings of the 13th International Conference on Electron Microscopy - ICEM
dc.source.conferencedate17/07/1994
dc.source.conferencelocationParis France
imec.availabilityPublished - open access
imec.internalnotesVol. 2A: Applications in Materials Science


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