HREM characterization of oxygen ion beam sputtered epitaxial CoSi2

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Authors
Bender, Hugo; De Coster, Walter; Brijs, Bert; Alay, Josep Lluis; Vandervorst, Wilfried
Conference
Proceedings of the 13th International Conference on Electron Microscopy - ICEM
Title
HREM characterization of oxygen ion beam sputtered epitaxial CoSi2
Publication type
Proceedings paper
Embargo date
9999-12-31
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