Publication:

HREM characterization of oxygen ion beam sputtered epitaxial CoSi2

Date

1994
Proceedings Paper
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dc.contributor.authorBender, Hugo
dc.contributor.authorDe Coster, Walter
dc.contributor.authorBrijs, Bert
dc.contributor.authorAlay, Josep Lluis
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-09-29T12:39:46Z
dc.date.available2021-09-29T12:39:46Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34
dc.source.beginpage637
dc.source.conferenceProceedings of the 13th International Conference on Electron Microscopy - ICEM
dc.source.conferencedate17/07/1994
dc.source.conferencelocationParis France
dc.source.endpage638
dc.title

HREM characterization of oxygen ion beam sputtered epitaxial CoSi2

dc.typeProceedings paper
dspace.entity.typePublication
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