Technology and reliability aspects of ultra-thin silicon dioxide layers

Thumbnail
View/open
Metadata
Show full item record
Authors
Heyns, Marc; Nigam, Tanya; Degraeve, Robin; Mertens, Paul; Schaekers, Marc; Bearda, Twan; De Gendt, Stefan; Groeseneken, Guido; Maes, Herman; Claes, Martine; Houssa, Michel; Vandewalle, N.; Ausloos, M.
Conference
International Symposium on Surface Science for Micro- and Nano-Device Fabrication - ISSS-3
Title
Technology and reliability aspects of ultra-thin silicon dioxide layers
Publication type
Oral presentation
Embargo date
9999-12-31
Collections