Publication:

Technology and reliability of sub-3nm oxides

Date

1999
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

3474.pdf 517.09 KB

Author(s)

Heyns, Marc  
;
Nigam, Tanya
;
Degraeve, Robin  
;
Mertens, Paul  
;
Schaekers, Marc  
;
De Gendt, Stefan  
;
Groeseneken, Guido  
;
Maes, Herman
;
Houssa, Michel  
;
Vandewalle, N.
;
Ausloos, M.

Journal

Abstract

Description

Statistics

Views

2000 since deposited on 2021-10-06
Acq. date: 2026-09-14

Citations

Statistics

Views

2000 since deposited on 2021-10-06
Acq. date: 2026-09-14

Citations