Technology and reliability of sub-3nm oxides

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Authors
Heyns, Marc; Nigam, Tanya; Degraeve, Robin; Mertens, Paul; Schaekers, Marc; De Gendt, Stefan; Groeseneken, Guido; Maes, Herman; Houssa, Michel; Vandewalle, N.; Ausloos, M.
Conference
4th Symposium on Thin Gate Oxides
Title
Technology and reliability of sub-3nm oxides
Publication type
Proceedings paper
Embargo date
9999-12-31
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