Mechanisms of TiN effective workfunction tuning at interfaces with HfO2 and SiO2

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Authors

Filatova, Elena; Konashuk, Aleksei; Sakhonenkov, Sergei; Gaisin, Aidar; Kolomiiets, Nadia; Afanas'ev, Veleri; Dekkers, Harold

DOI

10.1021/acs.jpcc.0c03605

ISSN

1932-7447

Issue

28

Journal

Journal of Physical Chemistry C

Volume

124

Title

Mechanisms of TiN effective workfunction tuning at interfaces with HfO2 and SiO2

Publication type

Journal article

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