Authors

Heyvaert, Ilse; Van Hove, Marleen; Witvrouw, Ann; Maex, Karen; Saerens, Annelies; Roussel, Philippe; Bender, Hugo

Conference

European Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.

Title

Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminium metallizations

Publication type

Oral presentation