Authors

Franco, Jacopo; de Marneffe, Jean-Francois; Vandooren, Anne; Kimura, Yosuke; Nyns, Laura; Wu, Zhicheng; El-Sayed, Al-Moatasem; Jech, Markus; Waldhoer, Dominic; Claes, Dieter; Arimura, Hiroaki; Ragnarsson, Lars-Ake; Afanas'ev, Valeri; Stesmans, Andre; Horiguchi, Naoto; Linten, Dimitri; Grasser, Tibor; Kaczer, Ben

Conference

51st IEEE Semiconductor Interface Specialists Conference (SISC)

Title

Enhancing the quality of low temperature SiO2 by atomic hydrogen exposure for excellent NBTI reliability

Publication type

Meeting abstract