Publication:

Enhancing the quality of low temperature SiO2 by atomic hydrogen exposure for excellent NBTI reliability

Date

2020
Meeting abstract
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Franco, Jacopo  
;
de Marneffe, Jean-Francois  
;
Vandooren, Anne  
;
Kimura, Yosuke  
;
Nyns, Laura  
;
Wu, Zhicheng  
;
El-Sayed, Al-Moatasem
;
Jech, Markus
;
Waldhoer, Dominic
;
Claes, Dieter  
;
Arimura, Hiroaki  
;
Ragnarsson, Lars-Ake  
;
Afanas'ev, Valeri
;
Stesmans, Andre  
;
Horiguchi, Naoto  
;
Linten, Dimitri  
;
Grasser, Tibor
;
Kaczer, Ben  

Journal

Abstract

Description

Metrics

Views

1985 since deposited on 2021-10-28
Acq. date: 2025-12-11

Citations

Metrics

Views

1985 since deposited on 2021-10-28
Acq. date: 2025-12-11

Citations