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Enhancing the quality of low temperature SiO2 by atomic hydrogen exposure for excellent NBTI reliability

dc.contributor.authorFranco, Jacopo
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorVandooren, Anne
dc.contributor.authorKimura, Yosuke
dc.contributor.authorNyns, Laura
dc.contributor.authorWu, Zhicheng
dc.contributor.authorEl-Sayed, Al-Moatasem
dc.contributor.authorJech, Markus
dc.contributor.authorWaldhoer, Dominic
dc.contributor.authorClaes, Dieter
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorAfanas'ev, Valeri
dc.contributor.authorStesmans, Andre
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorLinten, Dimitri
dc.contributor.authorGrasser, Tibor
dc.contributor.authorKaczer, Ben
dc.date.accessioned2021-10-28T21:44:59Z
dc.date.available2021-10-28T21:44:59Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35135
dc.sourceIIOimport
dc.titleEnhancing the quality of low temperature SiO2 by atomic hydrogen exposure for excellent NBTI reliability
dc.typeMeeting abstract
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorVandooren, Anne
dc.contributor.imecauthorKimura, Yosuke
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorWu, Zhicheng
dc.contributor.imecauthorClaes, Dieter
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorStesmans, Andre
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorKaczer, Ben
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecVandooren, Anne::0000-0002-2412-0176
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.source.peerreviewyes
dc.source.beginpage12.4
dc.source.conference51st IEEE Semiconductor Interface Specialists Conference (SISC)
dc.source.conferencedate16/12/2020
dc.source.conferencelocationonline online
dc.identifier.urlhttps://www.ieeesisc.org/programs/2020_SISC_technical_program.pdf
imec.availabilityPublished - imec


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