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Electrical properties and reliability of ultrathin remote plasma enhanced CVD Si3N4 layers
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Authors
Houssa, Michel
;
Degraeve, Robin
;
Pomarede, C.
;
van Dijk, Kitty
;
Werkhoven, Chris
;
Mertens, Paul
;
Heyns, Marc
;
Stesmans, Andre
Conference
30th IEEE Semiconductor Interface Specialists Conference
Title
Electrical properties and reliability of ultrathin remote plasma enhanced CVD Si3N4 layers
Publication type
Oral presentation
Embargo date
9999-12-31
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