Publication:
Electrical properties and reliability of ultrathin remote plasma enhanced CVD Si3N4 layers
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1896 since deposited on 2021-10-06
2last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1896 since deposited on 2021-10-06
2last month
Acq. date: 2025-12-11
Citations