Authors

Jacobs, Kristof J.P.; Li, Yunlong; Stucchi, Michele; De Wolf, Ingrid; Van Huylenbroeck, Stefaan; De Vos, Joeri; Beyne, Eric

ISSN

2156-3950

Issue

9

Journal

IEEE Transactions on Components, Packaging and Manufacturing Technology

Volume

10

Title

Optical beam-based defect localization methodologies for open and short failures in micrometer-scale 3-D TSV interconnects

Publication type

Journal article