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300mm wafer level WS2 p-MOS capacitor characterization, smulation, and analysis
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Authors
Koladi Mootheri, Vivek
;
Okuyama, Atsushi
;
Smets, Quentin
;
Schram, Tom
;
Asselberghs, Inge
;
Heyns, Marc
;
Radu, Iuliana
;
Lin, Dennis
Conference
51st IEEE Semiconductor Interface Specialist Conference - SISC 2020
Title
300mm wafer level WS2 p-MOS capacitor characterization, smulation, and analysis
Publication type
Meeting abstract
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