300mm wafer level WS2 p-MOS capacitor characterization, smulation, and analysis

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Authors
Koladi Mootheri, Vivek; Okuyama, Atsushi; Smets, Quentin; Schram, Tom; Asselberghs, Inge; Heyns, Marc; Radu, Iuliana; Lin, Dennis
Conference
51st IEEE Semiconductor Interface Specialist Conference - SISC 2020
Title
300mm wafer level WS2 p-MOS capacitor characterization, smulation, and analysis
Publication type
Meeting abstract
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