Authors

Jones, S. K.; Ahmed, M.; Bazley, D. J.; Beanland, R. J.; De Wolf, Ingrid; Hill, C.; Rothwell, W. J.

Conference

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes

Title

Characterisation of mechanical stresses of device isolation structures by micro-Raman spectroscopy and modelling

Publication type

Proceedings paper

Embargo date

9999-12-31