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Wet-chemical cleaning of cobalt and molybdenum for advanced interconnects

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorKesters, Els
dc.contributor.authorUsman Ibrahim, Ansar
dc.contributor.authorKlipp, Andreas
dc.contributor.authorPacco, Antoine
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorHolsteyns, Frank
dc.date.accessioned2021-10-28T23:42:54Z
dc.date.available2021-10-28T23:42:54Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35443
dc.sourceIIOimport
dc.titleWet-chemical cleaning of cobalt and molybdenum for advanced interconnects
dc.typeMeeting abstract
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorUsman Ibrahim, Ansar
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceSurface Preparation and Cleaning Conference 2020 - SPCC
dc.source.conferencedate31/08/2020
dc.source.conferencelocationOnline Online
dc.identifier.urlhttps://conferences.linx-consulting.com/wp-content/uploads/2020/09/01-05-Q_T_Le-imec-Wet-chemical_Cleaning_of_Cobalt_and_Molybdenum_for_Advanced_Interconnects.pdf
imec.availabilityPublished - open access


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