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Area selective atomic layer deposition of molybdenum films on nanoscale metal and metal nitride patterns

dc.contributor.authorLee, Se-Won
dc.contributor.authorKim, Moo-Sung
dc.contributor.authorLee, Changwon
dc.contributor.authorIvanov, Sergei
dc.contributor.authorDelabie, Annelies
dc.contributor.authorvan der Veen, Marleen
dc.date.accessioned2021-10-28T23:44:47Z
dc.date.available2021-10-28T23:44:47Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35447
dc.sourceIIOimport
dc.titleArea selective atomic layer deposition of molybdenum films on nanoscale metal and metal nitride patterns
dc.typeMeeting abstract
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.source.peerreviewyes
dc.source.conferenceAVS 20th International Conference on Atomic Layer Deposition (ALD 2020)
dc.source.conferencedate28/06/2020
dc.source.conferencelocationvirtual conference virtual conference
imec.availabilityPublished - imec


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