dc.contributor.author | Lee, Se-Won | |
dc.contributor.author | Kim, Moo-Sung | |
dc.contributor.author | Lee, Changwon | |
dc.contributor.author | Ivanov, Sergei | |
dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | van der Veen, Marleen | |
dc.date.accessioned | 2021-10-28T23:44:47Z | |
dc.date.available | 2021-10-28T23:44:47Z | |
dc.date.issued | 2020 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/35447 | |
dc.source | IIOimport | |
dc.title | Area selective atomic layer deposition of molybdenum films on nanoscale metal and metal nitride patterns | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | van der Veen, Marleen | |
dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
dc.source.peerreview | yes | |
dc.source.conference | AVS 20th International Conference on Atomic Layer Deposition (ALD 2020) | |
dc.source.conferencedate | 28/06/2020 | |
dc.source.conferencelocation | virtual conference virtual conference | |
imec.availability | Published - imec | |