dc.contributor.author | Loo, Roger | |
dc.contributor.author | Porret, Clément | |
dc.contributor.author | Han, Han | |
dc.contributor.author | Depauw, Valerie | |
dc.date.accessioned | 2021-10-29T00:11:00Z | |
dc.date.available | 2021-10-29T00:11:00Z | |
dc.date.issued | 2020-07 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/35503 | |
dc.source | IIOimport | |
dc.title | Epitaxial Ge-on-nothing virtual substrates for 3D device stacking technologies | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.imecauthor | Porret, Clément | |
dc.contributor.imecauthor | Han, Han | |
dc.contributor.imecauthor | Depauw, Valerie | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.contributor.orcidimec | Porret, Clément::0000-0002-4561-348X | |
dc.contributor.orcidimec | Han, Han::0000-0003-2169-8332 | |
dc.contributor.orcidimec | Depauw, Valerie::0000-0003-2045-9698 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 136840 | |
dc.source.conference | ECS-2020 Fall Meeting, Symposium: SiGe, Ge & Related Compounds: Materials, Processing and Devices | |
dc.source.conferencedate | 4/10/2020 | |
dc.source.conferencelocation | Honolulu, HI USA | |
dc.identifier.url | https://ecs.confex.com/ecs/prime2020/meetingapp.cgi/Paper/136840 | |
imec.availability | Published - imec | |