Show simple item record

Epitaxial Ge-on-nothing virtual substrates for 3D device stacking technologies

dc.contributor.authorLoo, Roger
dc.contributor.authorPorret, Clément
dc.contributor.authorHan, Han
dc.contributor.authorDepauw, Valerie
dc.date.accessioned2021-10-29T00:11:28Z
dc.date.available2021-10-29T00:11:28Z
dc.date.issued2020-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35504
dc.sourceIIOimport
dc.titleEpitaxial Ge-on-nothing virtual substrates for 3D device stacking technologies
dc.typeProceedings paper
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorHan, Han
dc.contributor.imecauthorDepauw, Valerie
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecHan, Han::0000-0003-2169-8332
dc.contributor.orcidimecDepauw, Valerie::0000-0003-2045-9698
dc.source.peerreviewyes
dc.source.beginpage195
dc.source.endpage201
dc.source.conferencePRiME 2020: SiGe, Ge, and Related Compounds: Materials, Processing, and Devices 9
dc.source.conferencedate4/10/2020
dc.source.conferencelocationHonolulu, HI USA
dc.identifier.urlhttps://iopscience.iop.org/article/10.1149/09805.0195ecst/pdf
imec.availabilityPublished - imec
imec.internalnotesECS Transactions; Vol. 98, Issue 5


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record