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Characterization of silicon carbon nitride for low temperature wafer-to-wafer direct bonding
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Authors
Nagano, Fuya
;
Iacovo, Serena
;
Phommahaxay, Alain
;
Inoue, Fumihiro
;
Sleeckx, Erik
;
De Gendt, Stefan
;
Beyer, Gerald
;
Beyne, Eric
Conference
PRiME 2020: Semiconductor Wafer Bonding: Science, Technology, and Applications 16
Title
Characterization of silicon carbon nitride for low temperature wafer-to-wafer direct bonding
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