Show simple item record

Isotropic etches for nanosheet device integration - Wet or dry?

dc.contributor.authorOniki, Yusuke
dc.contributor.authorKenis, Karine
dc.contributor.authorWostyn, Kurt
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorHolsteyns, Frank
dc.date.accessioned2021-10-29T01:33:52Z
dc.date.available2021-10-29T01:33:52Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35672
dc.sourceIIOimport
dc.titleIsotropic etches for nanosheet device integration - Wet or dry?
dc.typeMeeting abstract
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.source.peerreviewyes
dc.source.conferenceSurface Preparation and Cleaning Conference 2020 - SPCC
dc.source.conferencedate1/04/2020
dc.source.conferencelocationonline online
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record