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Isotropic etches for nanosheet device integration - Wet or dry?
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Authors
Oniki, Yusuke
;
Kenis, Karine
;
Wostyn, Kurt
;
Altamirano Sanchez, Efrain
;
Holsteyns, Frank
Conference
Surface Preparation and Cleaning Conference 2020 - SPCC
Title
Isotropic etches for nanosheet device integration - Wet or dry?
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