Publication:

Isotropic etches for nanosheet device integration - Wet or dry?

Date

2020
Meeting abstract
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Author(s)

Oniki, Yusuke  
;
Kenis, Karine  
;
Wostyn, Kurt  
;
Altamirano Sanchez, Efrain  
;
Holsteyns, Frank  

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Abstract

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2087 since deposited on 2021-10-29
Acq. date: 2026-05-20

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2087 since deposited on 2021-10-29
Acq. date: 2026-05-20

Citations