Publication:

Nanosheet RMG: metal gate and interface dipole patterning

Date

2020
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Author(s)

Oniki, Yusuke  
;
Ragnarsson, Lars-Ake  
;
Cott, Daire  
;
Dekkers, Harold  
;
Dentoni Litta, Eugenio  
;
Altamirano Sanchez, Efrain  
;
Holsteyns, Frank  
;
Horiguchi, Naoto  

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2408 since deposited on 2021-10-29
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