Publication:
Nanosheet RMG: metal gate and interface dipole patterning
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2416 since deposited on 2021-10-29
3last month
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Acq. date: 2026-07-18
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Statistics
Views
2416 since deposited on 2021-10-29
3last month
1last week
Acq. date: 2026-07-18
Citations