Show simple item record

Nanosheet RMG: metal gate and interface dipole patterning

dc.contributor.authorOniki, Yusuke
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorCott, Daire
dc.contributor.authorDekkers, Harold
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-29T01:34:24Z
dc.date.available2021-10-29T01:34:24Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35673
dc.sourceIIOimport
dc.titleNanosheet RMG: metal gate and interface dipole patterning
dc.typeMeeting abstract
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewyes
dc.source.conferenceSurface Preparation and Cleaning Conference - SPCC 2020
dc.source.conferencedate31/08/2020
dc.source.conferencelocationonline online
dc.identifier.urlhttps://www.linx-consulting.com/wp-content/uploads/2020/08/LINX_SPCC2020_Agenda_R12.pdf
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record