Authors

Kubicek, Stefan; Henson, W. K.; De Keersgieter, An; Badenes, Gonçal; Jansen, Philippe; van Meer, Hans; Kerr, Daniel; Naem, Abdalla; Deferm, Ludo; De Meyer, Kristin

Conference

International Electron Devices Meeting. Technical Digest; 5-8 Dec. 1999; Washington, D.C., USA.

Title

Investigation of instrinsic transistor performance of advanced CMOS devices with 2.5 nm NO gate oxides

Publication type

Proceedings paper