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Fabrication challenges in integrating self-assembled block copolymer process in semiconductor devices
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Authors
Seema Saseendran, Sandeep
;
Paneri, Abhilash
;
Tobback, Bert
;
Kutrzeba Kotowska, Bogumila
;
Vecchio, Emma
;
Jamieson, Geraldine
;
Paraschiv, Vasile
;
Figeys, Bruno
;
Suh, Hyo Seon
;
Sabuncuoglu Tezcan, Deniz
;
Takahashi, Kohei
;
Fujikane, Masaki
;
Himeno, Atsushi
;
Nakamura, Kunihiko
;
Tambo, Naoki
;
Nakata, Yuki
;
Tanaka, Hiroyuki
;
Naito, Yasuyuki
Conference
2020 International Conference on SOlid State Devices and Materials - SSDM
Title
Fabrication challenges in integrating self-assembled block copolymer process in semiconductor devices
Publication type
Proceedings paper
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