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Fabrication challenges in integrating self-assembled block copolymer process in semiconductor devices

dc.contributor.authorSeema Saseendran, Sandeep
dc.contributor.authorPaneri, Abhilash
dc.contributor.authorTobback, Bert
dc.contributor.authorKutrzeba Kotowska, Bogumila
dc.contributor.authorVecchio, Emma
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorFigeys, Bruno
dc.contributor.authorSuh, Hyo Seon
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorTakahashi, Kohei
dc.contributor.authorFujikane, Masaki
dc.contributor.authorHimeno, Atsushi
dc.contributor.authorNakamura, Kunihiko
dc.contributor.authorTambo, Naoki
dc.contributor.authorNakata, Yuki
dc.contributor.authorTanaka, Hiroyuki
dc.contributor.authorNaito, Yasuyuki
dc.date.accessioned2021-10-29T03:52:34Z
dc.date.available2021-10-29T03:52:34Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35919
dc.sourceIIOimport
dc.titleFabrication challenges in integrating self-assembled block copolymer process in semiconductor devices
dc.typeProceedings paper
dc.contributor.imecauthorSeema Saseendran, Sandeep
dc.contributor.imecauthorPaneri, Abhilash
dc.contributor.imecauthorTobback, Bert
dc.contributor.imecauthorKutrzeba Kotowska, Bogumila
dc.contributor.imecauthorVecchio, Emma
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorSuh, Hyo Seon
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorTakahashi, Kohei
dc.contributor.imecauthorHimeno, Atsushi
dc.contributor.orcidimecSeema Saseendran, Sandeep::0000-0001-8556-0821
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.source.peerreviewyes
dc.source.conference2020 International Conference on SOlid State Devices and Materials - SSDM
dc.source.conferencedate27/09/2020
dc.source.conferencelocationVirtual Japan
dc.identifier.urlhttps://confit.atlas.jp/guide/event/ssdm2020/subject/C-2-05/advanced
imec.availabilityPublished - imec


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