dc.contributor.author | Soussou, Assawer | |
dc.contributor.author | Schram, Tom | |
dc.contributor.author | Miyaguchi, Kenichi | |
dc.contributor.author | Chakarov, Ivan | |
dc.contributor.author | Parvais, Bertrand | |
dc.contributor.author | Ervin, Joseph | |
dc.date.accessioned | 2021-10-29T04:37:49Z | |
dc.date.available | 2021-10-29T04:37:49Z | |
dc.date.issued | 2020 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/35996 | |
dc.source | IIOimport | |
dc.title | Evaluation of the impact of source/drain epi implementation on logic performance using combined process and circuit simulation | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Soussou, Assawer | |
dc.contributor.imecauthor | Schram, Tom | |
dc.contributor.imecauthor | Miyaguchi, Kenichi | |
dc.contributor.imecauthor | Parvais, Bertrand | |
dc.contributor.orcidimec | Schram, Tom::0000-0003-1533-7055 | |
dc.contributor.orcidimec | Miyaguchi, Kenichi::0000-0002-7073-6457 | |
dc.contributor.orcidimec | Parvais, Bertrand::0000-0003-0769-7069 | |
dc.source.peerreview | yes | |
dc.source.beginpage | A-5-03 | |
dc.source.conference | International Conference on Solid State Devices and Materials - SSDM 2020 | |
dc.source.conferencedate | 27/09/2020 | |
dc.source.conferencelocation | San Francisco, CA USA | |
dc.identifier.url | https://confit.atlas.jp/guide/event/ssdm2020/subject/A-5-03/advanced?cryptoId= | |
imec.availability | Published - imec | |