Authors

Lanckmans, Filip; Baklanov, Mikhaïl; Alaerts, Carine; Vanhaelemeersch, Serge; Maex, Karen

Conference

Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon

Title

Post dry-etch cleaning issues of an organic low-K dielectric

Publication type

Proceedings paper

Embargo date

9999-12-31