| dc.contributor.author | Lanckmans, Filip | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Alaerts, Carine | |
| dc.contributor.author | Vanhaelemeersch, Serge | |
| dc.contributor.author | Maex, Karen | |
| dc.date.accessioned | 2021-10-06T11:40:32Z | |
| dc.date.available | 2021-10-06T11:40:32Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3606 | |
| dc.source | IIOimport | |
| dc.title | Post dry-etch cleaning issues of an organic low-K dielectric | |
| dc.type | Proceedings paper | |
| dc.contributor.imecauthor | Vanhaelemeersch, Serge | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Vanhaelemeersch, Serge::0000-0003-2102-7395 | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 89 | |
| dc.source.endpage | 92 | |
| dc.source.conference | Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon | |
| dc.source.conferencedate | 21/09/1998 | |
| dc.source.conferencelocation | Oostende Belgium | |
| imec.availability | Published - open access | |
| imec.internalnotes | Solid State Phenomena; Vols. 65-66 | |
