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Impact of surface condition on Cobalt drift into LK3.0 films

dc.contributor.authorTierno, Davide
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorKljucar, Luka
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorCroes, Kristof
dc.date.accessioned2021-10-29T05:23:58Z
dc.date.available2021-10-29T05:23:58Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36072
dc.sourceIIOimport
dc.titleImpact of surface condition on Cobalt drift into LK3.0 films
dc.typeProceedings paper
dc.contributor.imecauthorTierno, Davide
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorKljucar, Luka
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecTierno, Davide::0000-0003-4915-904X
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage142
dc.source.endpage144
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC 2020
dc.source.conferencedate1/06/2020
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access


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