Study of the early stage kinetics of SOI formation in stimulated regimes
| dc.contributor.author | Litovchenko, V. | |
| dc.contributor.author | Romanyuk, B. | |
| dc.contributor.author | Efremov, A. | |
| dc.contributor.author | Melnik, V. | |
| dc.contributor.author | Claeys, C. | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.date.accessioned | 2021-10-14T11:29:41Z | |
| dc.date.available | 2021-10-14T11:29:41Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3628 | |
| dc.source | IIOimport | |
| dc.title | Study of the early stage kinetics of SOI formation in stimulated regimes | |
| dc.type | Oral presentation | |
| dc.source.peerreview | no | |
| dc.source.conference | Symposium E of the European Materials Research Society 1999 Spring Meeting; June 1-4, 1999; Strasbourg, France. | |
| dc.source.conferencelocation | ||
| imec.availability | Published - imec |
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