Show simple item record

Electrode design for efficient excitation of vibrational modes in an ALN based PMUT

dc.contributor.authorWeekers, Bart
dc.contributor.authorBillen, Margo
dc.contributor.authorTabruyn, Dries
dc.contributor.authorHaouari, Rachid
dc.contributor.authorGijsenbergh, Pieter
dc.contributor.authorRochus, Veronique
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorLagae, Liesbet
dc.date.accessioned2021-10-29T07:57:10Z
dc.date.available2021-10-29T07:57:10Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36315
dc.sourceIIOimport
dc.titleElectrode design for efficient excitation of vibrational modes in an ALN based PMUT
dc.typeOral presentation
dc.contributor.imecauthorWeekers, Bart
dc.contributor.imecauthorBillen, Margo
dc.contributor.imecauthorTabruyn, Dries
dc.contributor.imecauthorHaouari, Rachid
dc.contributor.imecauthorGijsenbergh, Pieter
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorLagae, Liesbet
dc.contributor.orcidimecWeekers, Bart::0000-0001-5949-8411
dc.contributor.orcidimecBillen, Margo::0000-0002-0189-7388
dc.contributor.orcidimecGijsenbergh, Pieter::0000-0003-0135-6968
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceCOMSOL Conference 2020 Europe
dc.source.conferencedate14/10/2020
dc.source.conferencelocationonline online
dc.identifier.urlhttps://www.comsol.ch/paper/download/856831/Electrode%20Design%20for%20Efficient%20Excitation%20of%20Vibrational%20Modes%20in%20an%20AlN%20based%20PMUT.pdf
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
46532.pdf
Size:
393.4Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record