dc.contributor.author | Weekers, Bart | |
dc.contributor.author | Billen, Margo | |
dc.contributor.author | Tabruyn, Dries | |
dc.contributor.author | Haouari, Rachid | |
dc.contributor.author | Gijsenbergh, Pieter | |
dc.contributor.author | Rochus, Veronique | |
dc.contributor.author | Rottenberg, Xavier | |
dc.contributor.author | Lagae, Liesbet | |
dc.date.accessioned | 2021-10-29T07:57:10Z | |
dc.date.available | 2021-10-29T07:57:10Z | |
dc.date.issued | 2020 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/36315 | |
dc.source | IIOimport | |
dc.title | Electrode design for efficient excitation of vibrational modes in an ALN based PMUT | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Weekers, Bart | |
dc.contributor.imecauthor | Billen, Margo | |
dc.contributor.imecauthor | Tabruyn, Dries | |
dc.contributor.imecauthor | Haouari, Rachid | |
dc.contributor.imecauthor | Gijsenbergh, Pieter | |
dc.contributor.imecauthor | Rochus, Veronique | |
dc.contributor.imecauthor | Rottenberg, Xavier | |
dc.contributor.imecauthor | Lagae, Liesbet | |
dc.contributor.orcidimec | Weekers, Bart::0000-0001-5949-8411 | |
dc.contributor.orcidimec | Billen, Margo::0000-0002-0189-7388 | |
dc.contributor.orcidimec | Gijsenbergh, Pieter::0000-0003-0135-6968 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | COMSOL Conference 2020 Europe | |
dc.source.conferencedate | 14/10/2020 | |
dc.source.conferencelocation | online online | |
dc.identifier.url | https://www.comsol.ch/paper/download/856831/Electrode%20Design%20for%20Efficient%20Excitation%20of%20Vibrational%20Modes%20in%20an%20AlN%20based%20PMUT.pdf | |
imec.availability | Published - open access | |