Publication:

Selective Ge removal from SiGe surface for Si-cap-free SiGe passivation

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1890 since deposited on 2021-10-29
10last month
Acq. date: 2026-08-31

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Views

1890 since deposited on 2021-10-29
10last month
Acq. date: 2026-08-31

Citations