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Selective Ge removal from SiGe surface for Si-cap-free SiGe passivation
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Authors
Wostyn, Kurt
;
Arimura, Hiroaki
;
Hikavyy, Andriy
;
Rondas, Dirk
;
Vaisman Chasin, Adrian
;
Conard, Thierry
;
Ragnarsson, Lars-Ake
;
Horiguchi, Naoto
Conference
Surface Preparation and Cleaning Conference - SPCC 2020
Title
Selective Ge removal from SiGe surface for Si-cap-free SiGe passivation
Publication type
Meeting abstract
Embargo date
9999-12-31
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