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Selective Ge removal from SiGe surface for Si-cap-free SiGe passivation

dc.contributor.authorWostyn, Kurt
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorRondas, Dirk
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorConard, Thierry
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-29T08:11:55Z
dc.date.available2021-10-29T08:11:55Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36337
dc.sourceIIOimport
dc.titleSelective Ge removal from SiGe surface for Si-cap-free SiGe passivation
dc.typeMeeting abstract
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorRondas, Dirk
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceSurface Preparation and Cleaning Conference - SPCC 2020
dc.source.conferencedate31/08/2020
dc.source.conferencelocationonline online
dc.identifier.urlhttps://www.linx-consulting.com/wp-content/uploads/2020/08/LINX_SPCC2020_Agenda_R12.pdf
imec.availabilityPublished - open access


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