Authors

Wouters, Lennaert; Minj, Albert; Celano, Umberto; Hantschel, Thomas; Paredis, Kristof; Vandervorst, Wilfried

Journal

Park Systems.com: Application Note #54

Title

Carrier profiling in high vacuum using Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy

Publication type

Journal article

Embargo date

9999-12-31