Authors

Loo, Roger; Caymax, Matty; Libezny, Milan; Blavier, G.; Brijs, Bert; Geenen, Luc; Vandervorst, Wilfried

Conference

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes

Title

Analysis of selectively grown epitaxial Si1-xGex by spectroscopic ellipsometry and comparison with RBS and SIMS

Publication type

Proceedings paper

Embargo date

9999-12-31