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Fin bending in dimensional scaling

dc.contributor.authorZhang, Liping
dc.contributor.authorHellin, David
dc.contributor.authorSepulveda Marquez, Alfonso
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorMorin, Pierre
dc.contributor.authorWang, Shouhua
dc.contributor.authorHopf, Toby
dc.contributor.authorKenis, Karine
dc.contributor.authorLorant, Christophe
dc.contributor.authorSebaai, Farid
dc.contributor.authorBatuk, Dmitry
dc.contributor.authorBriggs, Basoene
dc.contributor.authorMertens, Hans
dc.contributor.authorDemuynck, Steven
dc.date.accessioned2021-10-29T08:56:25Z
dc.date.available2021-10-29T08:56:25Z
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36403
dc.sourceIIOimport
dc.titleFin bending in dimensional scaling
dc.typeOral presentation
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorHellin, David
dc.contributor.imecauthorSepulveda Marquez, Alfonso
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorMorin, Pierre
dc.contributor.imecauthorWang, Shouhua
dc.contributor.imecauthorHopf, Toby
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorLorant, Christophe
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorBatuk, Dmitry
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.orcidimecSepulveda Marquez, Alfonso::0000-0003-4726-177X
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecMorin, Pierre::0000-0002-4637-496X
dc.contributor.orcidimecWang, Shouhua::0000-0002-9105-8552
dc.contributor.orcidimecLorant, Christophe::0000-0001-7363-9348
dc.contributor.orcidimecBatuk, Dmitry::0000-0002-6384-6690
dc.source.peerreviewno
dc.source.conference2020 SPIE Advanced Lithography: Advances in Patterning Materials and Processes XXXII
dc.source.conferencedate23/02/2020
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec


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