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Plasma process induced damage on CMOS-integrated ion-sensitive field effect transistors
Publication:
Plasma process induced damage on CMOS-integrated ion-sensitive field effect transistors
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Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Maes, D.
;
Van Steenkiste, Filip
;
Haspeslagh, Luc
;
Baert, Kris
;
Gumbrecht, W.
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1940
since deposited on 2021-10-14
Acq. date: 2025-12-10
Citations
Metrics
Views
1940
since deposited on 2021-10-14
Acq. date: 2025-12-10
Citations