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First demonstration of ruthenium and molybdenum word lines integrated into 40nm ptch 3D NAND memory devices

dc.contributor.authorAjaykumar, Arjun
dc.contributor.authorBreuil, Laurent
dc.contributor.authorKatcko, Kostantine
dc.contributor.authorSchleicher, Filip
dc.contributor.authorSebaai, Farid
dc.contributor.authorOniki, Yusuke
dc.contributor.authorRamesh, Siva
dc.contributor.authorArreghini, Antonio
dc.contributor.authorNyns, Laura
dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorStiers, Jimmy
dc.contributor.authorRosmeulen, Maarten
dc.contributor.authorVan den Bosch, Geert
dc.date.accessioned2021-10-31T08:03:46Z
dc.date.available2021-10-31T08:03:46Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36439
dc.sourceIIOimport
dc.titleFirst demonstration of ruthenium and molybdenum word lines integrated into 40nm ptch 3D NAND memory devices
dc.typeProceedings paper
dc.contributor.imecauthorAjaykumar, Arjun
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorKatcko, Kostantine
dc.contributor.imecauthorSchleicher, Filip
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorRamesh, Siva
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorSoulie, Jean-Philippe
dc.contributor.imecauthorStiers, Jimmy
dc.contributor.imecauthorRosmeulen, Maarten
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecKatcko, Kostantine::0000-0002-0576-8962
dc.contributor.orcidimecSchleicher, Filip::0000-0003-3630-7285
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.contributor.orcidimecRamesh, Siva::0000-0002-8473-7258
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecSoulie, Jean-Philippe::0000-0002-5956-6485
dc.contributor.orcidimecRosmeulen, Maarten::0000-0002-3663-7439
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.source.peerreviewyes
dc.source.conference2021 Symposium on VLSI Technology
dc.source.conferencedate13/06/2021
dc.source.conferencelocationVirtual Japan
dc.identifier.urlhttps://ieeexplore.ieee.org/document/9508691
imec.availabilityPublished - imec


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