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Quantifying the Ru area selective deposition in nanometer confined volumes using RBS

dc.contributor.authorClaessens, Niels
dc.contributor.authorRahnemaihaghighi, Negin
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVantomme, Andre
dc.contributor.authorMeersschaut, Johan
dc.date.accessioned2021-10-31T08:14:21Z
dc.date.available2021-10-31T08:14:21Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36577
dc.sourceIIOimport
dc.titleQuantifying the Ru area selective deposition in nanometer confined volumes using RBS
dc.typeMeeting abstract
dc.contributor.imecauthorClaessens, Niels
dc.contributor.imecauthorRahnemaihaghighi, Negin
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.orcidimecClaessens, Niels::0000-0002-8863-9532
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.source.peerreviewno
dc.source.conferenceEMRS ALTECH 2021 - Analytical techniques for precise characterization of nanomaterials
dc.source.conferencedate31/05/2021
dc.source.conferencelocationvirtual virtual
imec.availabilityPublished - imec


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