Publication:
Lloyd's Mirror Interference Lithography Below a 22-nm Pitch with an Accessible, Table-top, 13.5 nm High-Harmonic EUV Source
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2263 since deposited on 2021-10-31
2last month
Acq. date: 2026-01-10
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Views
2263 since deposited on 2021-10-31
2last month
Acq. date: 2026-01-10
Citations