Advanced cleaning for the growth of ultrathin gate oxide

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Authors

Mertens, Paul; Bearda, Twan; Houssa, Michel; Loewenstein, Lee; Cornelissen, Ingrid; De Gendt, Stefan; Kenis, Karine; Teerlinck, Ivo; Vos, Rita; Meuris, Marc; Heyns, Marc

Issue

1_4

Journal

Microelectronic Engineering

Volume

48

Title

Advanced cleaning for the growth of ultrathin gate oxide

Publication type

Journal article

Embargo date

9999-12-31

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