Authors

Mertens, Paul; Jacobs, Leon; Goris, Karen; Kenis, Karine; Loewenstein, Lee; Teerlinck, Ivo; Bearda, Twan; De Gendt, Stefan; Vos, Rita; Heyns, Marc

Conference

Electrochemical Society Fall Meeting: 6th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Title

Distribution of metal contamination in SiO2/Si systems

Publication type

Meeting abstract

Embargo date

9999-12-31