Publication:

Distribution of metal contamination in SiO2/Si systems

Date

1999
Meeting abstract
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3638.pdf 290.42 KB

Author(s)

Mertens, Paul  
;
Jacobs, Leon
;
Goris, Karen
;
Kenis, Karine  
;
Loewenstein, Lee
;
Teerlinck, Ivo
;
Bearda, Twan
;
De Gendt, Stefan  
;
Vos, Rita  
;
Heyns, Marc  

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2099 since deposited on 2021-10-14
Acq. date: 2025-12-08

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2099 since deposited on 2021-10-14
Acq. date: 2025-12-08

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