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Conference contributions
Distribution of metal contamination in SiO2/Si systems
Publication:
Distribution of metal contamination in SiO2/Si systems
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Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mertens, Paul
;
Jacobs, Leon
;
Goris, Karen
;
Kenis, Karine
;
Loewenstein, Lee
;
Teerlinck, Ivo
;
Bearda, Twan
;
De Gendt, Stefan
;
Vos, Rita
;
Heyns, Marc
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2099
since deposited on 2021-10-14
Acq. date: 2026-01-09
Citations
Metrics
Views
2099
since deposited on 2021-10-14
Acq. date: 2026-01-09
Citations